High-resolution depth-sensing nanoindentation system for measuring hardness, elastic modulus, creep, and time-dependent properties of thin films, coatings, and bulk materials at the nanoscale.
This nanoindentation system uses a diamond indenter to apply controlled loads at the nanometer scale and measures the resulting displacement with sub-nanometer resolution. From the load-displacement curve, hardness (H) and reduced elastic modulus (Er) are extracted using the Oliver-Pharr method, along with creep, relaxation, and elastic recovery parameters.
Nanoindentation — also called depth-sensing indentation or instrumented indentation testing (IIT) — is the primary technique for measuring mechanical properties of thin films, coatings, and surface-modified materials where conventional hardness testing cannot be applied. By continuously recording load and displacement during the indentation cycle with sub-nanometer resolution, the technique extracts hardness (H) and reduced elastic modulus (Er) from the unloading segment of the load-displacement curve using the well-established Oliver-Pharr analysis framework.
The continuous stiffness measurement (CSM) mode superimposes a small oscillatory force on the primary loading signal, enabling continuous monitoring of hardness and modulus as a function of indentation depth — providing information about depth-dependent property gradients in coatings, case-hardened surfaces, and graded materials.
Automated mapping mode enables spatially resolved mechanical property measurements across user-defined grids on heterogeneous materials — generating hardness and modulus maps that correlate with microstructural features observed by SEM or optical microscopy.
| Load Range | < 1 µN – 500 mN (model dependent) |
| Load Resolution | < 1 nN |
| Displacement Range | 0 – 20 µm |
| Displacement Resolution | < 0.01 nm |
| Indenters | Berkovich, cube corner, spherical, flat punch |
| Imaging | In-situ optical / SPM (model dependent) |
| Modes | Load control, displacement control, CSM, mapping |
| CSM Frequency | 1 Hz – 200 Hz |
| Stage | Motorized XY, 100×100 mm |
| Environment | Ambient, vacuum, fluid cell, heating (options) |
| Software | Full NI analysis, Oliver-Pharr, CSM hardness depth profiles |
| Vibration Isolation | Active or passive (model dependent) |
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