Advanced dual-beam system for nanoscale analysis, cross-section preparation, 3D tomography and in-situ material characterization.
The TESCAN FIB-SEM combines a focused ion beam column with a high-resolution scanning electron microscope in a single platform. Ideal for advanced materials research, semiconductor failure analysis, geological sample preparation, and 3D nano-tomography. Delivers sub-nanometer resolution with exceptional stability and versatility.
The TESCAN FIB-SEM is a state-of-the-art analytical instrument that integrates a Gallium focused ion beam (FIB) column with a high-resolution field-emission scanning electron microscope (FE-SEM) into a single, compact system. This dual-beam configuration enables a wide range of applications — from nanoscale imaging and elemental analysis to site-specific sample preparation and 3D volume reconstruction.
Designed for demanding research environments, the system features TESCAN's proprietary wide-field optics (WFO) technology, which delivers exceptional depth of field and high-quality imaging across a wide range of beam currents. The integrated AutoLoader option enables automated, unattended sample exchange for high-throughput workflows.
Equipped with a comprehensive suite of detectors — including EDX, WDS, EBSD, and cathodoluminescence — the FIB-SEM provides a complete materials characterization solution in a single instrument.
| SEM Resolution | 0.7 nm at 15 kV (STEM mode) / 1.0 nm at 1 kV |
| FIB Resolution | 2.5 nm at 30 kV |
| SEM Accelerating Voltage | 200 V – 30 kV |
| FIB Accelerating Voltage | 1 kV – 30 kV |
| FIB Beam Current | 1 pA – 100 nA |
| SEM Beam Current | 1 pA – 400 nA |
| Ion Source | Gallium Liquid Metal Ion Source (LMIS) |
| Stage | 5-axis eucentric motorized stage |
| Sample Size | Up to 150 mm wafer (optional) |
| Detectors (Standard) | SE, BSE, In-Beam SE, In-Beam BSE |
| Optional Detectors | EDX, WDS, EBSD, CL, STEM, TKD |
| Gas Injection System | Up to 6 precursor gases (GIS) |
| Vacuum System | Oil-free turbomolecular pumps |
| Chamber Pressure | < 2×10⁻⁴ Pa |
| Operating System | Windows 10 / TESCAN ESSENCE™ Software |
| Power Requirements | 200–240 V, single phase, 50/60 Hz |
Our scientific instrument specialists are ready to help you find the best solution for your research needs.
